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SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 24 April 2017)] Damage to VUV, EUV, and X-ray Optics VI - Study of performance loss of Lyman alpha filters due to chemical contamination
Juha, Libor, Bajt, Saša, Soufli, Regina, Faye, Delphine, Zhang, Xueyan, Etcheto, Pierre, Auchère, FrédéricVolume:
10236
Year:
2017
Language:
english
DOI:
10.1117/12.2265864
File:
PDF, 2.32 MB
english, 2017