(Invited) Plasma Assisted Oblique Angle Deposition of...

ECS Transactions 2017 / 04 Vol. 77; Iss. 3

(Invited) Plasma Assisted Oblique Angle Deposition of Transparent and Conductive in-Plane Anisotropic ITO Thin Films

Parra-Barranco, Julian, Sanchez-Valencia, Juan Ramon, Aparicio, Francisco J., Garcia-Garcia, Francisco, Ferrer, Francisco J., Rico, Victor, Lopez-Santos, Carmen, Borras, Ana, Gonzalez-Elipe, Agustin R
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Volume:
77
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07703.0009ecst
Date:
April, 2017
File:
PDF, 1.87 MB
english, 2017
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