Impact of Channel Mobility Improvement Using Boron...

Impact of Channel Mobility Improvement Using Boron Diffusion on Different Power MOSFETs Voltage Classes

Soler, Victor, Cabello, Maria, Berthou, Maxime, Montserrat, Josep, Rebollo, José, Godignon, Phillippe, Bianda, Enea, Mihaila, Andrei
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.537
Date:
May, 2017
File:
PDF, 605 KB
english, 2017
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