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Theoretical investigation of the electronic and structural properties of AlN thin films
Abgaryan, K. K., Bazhanov, D. I., Mutigullin, I. V.Volume:
45
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739716080011
Date:
December, 2016
File:
PDF, 188 KB
english, 2016