SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Advances in Patterning Materials and Processes XXXIV - Modeling of NTD resist shrinkage

Hohle, Christoph K., Gronheid, Roel, Mülders, Thomas, Stock, Hans-Jürgen, Küchler, Bernd, Klostermann, Ulrich, Gao, Weimin, Demmerle, Wolfgang
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Volume:
10146
Year:
2017
Language:
english
DOI:
10.1117/12.2257909
File:
PDF, 1.00 MB
english, 2017
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