Silicon exfoliation by hydrogen implantation: Actual nature...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2017 / 06 Vol. 401

Silicon exfoliation by hydrogen implantation: Actual nature of precursor defects

Kuisseu, Pauline Sylvia Pokam, Pingault, Timothée, Ntsoenzok, Esidor, Regula, Gabrielle, Mazen, Frédéric, Sauldubois, Audrey, Andreazza, Caroline
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Volume:
401
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2017.04.033
Date:
June, 2017
File:
PDF, 1.98 MB
english, 2017
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