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Calibration-free quantitative analysis of thin-film oxide layers in semiconductors using Laser Induced Breakdown Spectroscopy (LIBS).
Davari, Seyyed Ali, Hu, Sheng, Pamu, Ravi, Mukherjee, DibyenduYear:
2017
Language:
english
Journal:
J. Anal. At. Spectrom.
DOI:
10.1039/c7ja00083a
File:
PDF, 2.41 MB
english, 2017