Dry e-beam etching of resist for optics

Journal of Physics Conference Series 2016 / 08 Vol. 741

Dry e-beam etching of resist for optics

Rogozhin, A, Bruk, M, Zhikharev, E, Streltsov, D, Spirin, A, Hramchihina, J
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Volume:
741
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/741/1/012115
Date:
August, 2016
File:
PDF, 899 KB
english, 2016
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