CMP behavior of alumina/metatitanic acid core–shell...

  • Main
  • 2017 / 5
  • CMP behavior of alumina/metatitanic acid core–shell...

CMP behavior of alumina/metatitanic acid core–shell abrasives on sapphire substrates

Wang, Xin, Lei, Hong, Chen, Ruling
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.05.013
Date:
May, 2017
File:
PDF, 1.81 MB
english, 2017
Conversion to is in progress
Conversion to is failed