CMP behavior of alumina/metatitanic acid core–shell abrasives on sapphire substrates
Wang, Xin, Lei, Hong, Chen, RulingLanguage:
english
Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2017.05.013
Date:
May, 2017
File:
PDF, 1.81 MB
english, 2017