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[AIP STRESS-INDUCED PHENOMENA IN METALLIZATION: Tenth International Workshop on Stress-Induced Phenomena in Metallization - Austin (Texas) (5–7 November 2008)] AIP Conference Proceedings - Cu Grain Growth in Damascene Narrow Trenches
Maitrejean, Sylvain, Carreau, Vincent, Thomas, Olivier, Labat, Stéphane, Kaouache, Belkhiri, Verdier, Marc, Lepinoux, Joel, Bréchet, Yves, Legros, Marc, Douin, Joel, Brandstetter, Stefan, Cayron, CyYear:
2009
Language:
english
DOI:
10.1063/1.3169253
File:
PDF, 6.56 MB
english, 2009