Analysis of H 2 and SiH...

Microscopy and Microanalysis 2016 / 07 Vol. 22; Iss. S3

Analysis of H 2 and SiH 4 in the Deposition of pm-Si:H Thin Films by PECVD Process for Solar Cell Applications

Plaza-Castillo, J., García-Barrientos, A., Moreno-Moreno, M., Arellano-Jiménez, M. J., Vizcaíno, K. Y., Bernal, J.L.
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Volume:
22
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/S1431927616010217
Date:
July, 2016
File:
PDF, 349 KB
english, 2016
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