Microwave Plasma Generation With Resonance Frequency...

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IEEE Transactions on Plasma Science 2017

Microwave Plasma Generation With Resonance Frequency Tracking and Power Regulation

Kwon, Soon Ku, Park, Seung-Jin, Won, Im Hee, Ahn, Cheolmin, Sim, Jae-Yoon
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Year:
2017
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2017.2699689
File:
PDF, 1.34 MB
english, 2017
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