Structure Design of Large Travel One-Arm Bridge Type Z-Axis...

Key Engineering Materials 2015 / 5 Vol. 645-646

Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage

Fan, Wei, Li, Zhong Shen, Jiang, Shao Yin
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Volume:
645-646
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.645-646.1064
Date:
May, 2015
File:
PDF, 241 KB
english, 2015
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