Selective Etching of Silicon in Preference to Germanium and Si0.5Ge0.5
Ahles, Christopher F., Choi, Jong Youn, Wolf, Steven F., Kummel, Andrew C.Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.7b02060
Date:
May, 2017
File:
PDF, 2.53 MB
english, 2017