Atomic layer etching of graphene through controlled ion beam for graphene-based electronics
Kim, Ki Seok, Ji, You Jin, Nam, Yeonsig, Kim, Ki Hyun, Singh, Eric, Lee, Jin Yong, Yeom, Geun YoungVolume:
7
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-017-02430-8
Date:
December, 2017
File:
PDF, 2.10 MB
english, 2017