Low-voltage shock-mitigated micro-electromechanical systems...

Applied Physics Letters 2017 / 05 Vol. 110; Iss. 20

Low-voltage shock-mitigated micro-electromechanical systems structure

Chen, Ang, Nam, Suhyun, Lai, Ying-Cheng, Chae, Junseok
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Volume:
110
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4983645
Date:
May, 2017
File:
PDF, 1.73 MB
english, 2017
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