[IEEE 2016 IEEE Energy Conversion Congress and Exposition (ECCE) - Milwaukee, WI, USA (2016.9.18-2016.9.22)] 2016 IEEE Energy Conversion Congress and Exposition (ECCE) - Dynamic matching system for radio-frequency plasma generation
Bastami, Anas Al, Jurkov, Alexander, Gould, Parker, Hsing, Mitchell, Schmidt, Martin, Perreault, David J.Year:
2016
Language:
english
DOI:
10.1109/ECCE.2016.7855058
File:
PDF, 931 KB
english, 2016