Atomic layer deposition of tin oxide thin films from...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 07 Vol. 35; Iss. 4

Atomic layer deposition of tin oxide thin films from bis[bis(trimethylsilyl)amino]tin(II) with ozone and water

Tupala, Jere, Kemell, Marianna, Mattinen, Miika, Meinander, Kristoffer, Seppälä, Sanni, Hatanpää, Timo, Räisänen, Jyrki, Ritala, Mikko, Leskelä, Markku
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4984279
Date:
July, 2017
File:
PDF, 2.69 MB
english, 2017
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