Thermal Budget Reduction in Triple Gate Oxide Process by...

ECS Transactions 2017 / 04 Vol. 77; Iss. 5

Thermal Budget Reduction in Triple Gate Oxide Process by Wet Etch Technique

Tai, Hsin, Liao, Hsin-Yi, Chen, Hsin-An, Tou, Pei-Ting, Liu, Wei-Ting, Lu, Ming-Chen, Ying, Tzung-Hua
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Volume:
77
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07705.0245ecst
Date:
April, 2017
File:
PDF, 89 KB
english, 2017
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