Operation of three-dimensional MEMS mirror by single...

Japanese Journal of Applied Physics 2017 / 06 Vol. 56; Iss. 6S1

Operation of three-dimensional MEMS mirror by single superposed driving signal

Nagasawa, Toshiya, Oguchi, Yohei, Iwase, Eiji
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06GN12
Date:
June, 2017
File:
PDF, 1.86 MB
english, 2017
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