Advanced scanning paths for focused ion beam milling

Advanced scanning paths for focused ion beam milling

Yoon, Hae-Sung, Kim, Chung-Soo, Lee, Hyun-Taek, Ahn, Sung-Hoon
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Volume:
143
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2017.05.023
Date:
September, 2017
File:
PDF, 14.41 MB
english, 2017
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