Review Article: Reactions of fluorine atoms with silicon,...

Review Article: Reactions of fluorine atoms with silicon, revisited, again

Donnelly, Vincent M.
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4983922
Date:
September, 2017
File:
PDF, 1.09 MB
english, 2017
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