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Bonding of SiO2 and SiO2 at Room Temperature Using Si Ultrathin Film
Utsumi, J., Ide, K., Ichiyanagi, Y.Volume:
75
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07509.0355ecst
Date:
September, 2016
File:
PDF, 721 KB
english, 2016