Microwave PECVD of Micro-Crystalline Silicon

MRS Proceedings 2002 Vol. 715

Microwave PECVD of Micro-Crystalline Silicon

Soppe, Wim, Devilee, Camile, Schiermeier, Sacha, Donker, Harry, Rath, J.K.
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Volume:
715
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-715-A19.8
File:
PDF, 212 KB
english, 2002
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