Progress and prospects in nanoscale dry processes: How can...

Japanese Journal of Applied Physics 2017 / 06 Vol. 56; Iss. 6S2

Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions?

Ishikawa, Kenji, Karahashi, Kazuhiro, Ichiki, Takanori, Chang, Jane P., George, Steven M., Kessels, W. M. M., Lee, Hae June, Tinck, Stefan, Um, Jung Hwan, Kinoshita, Keizo
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06HA02
Date:
June, 2017
File:
PDF, 1.35 MB
english, 2017
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