Diffusion doping of silicon with magnesium
Astrov, Yuri A., Shuman, Valentina B., Portsel, Leonid М., Lodygin, Аnatoly N., Pavlov, Sergey G., Abrosimov, Nikolay V., Shastin, Valery N., Hübers, Heinz-WilhelmLanguage:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201700192
Date:
May, 2017
File:
PDF, 446 KB
english, 2017