The role of active species in the N 2 and N 2 -H 2 RF...

Surface and Coatings Technology 2017 / 09 Vol. 324

The role of active species in the N 2 and N 2 -H 2 RF afterglows on selective surface nitriding of ALD-grown TiO 2 films

Wang, Yunfei, Ricard, Andre, Sarrette, Jean-Philippe, Kim, Ansoon, Kim, Yu Kwon
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Volume:
324
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2017.05.085
Date:
September, 2017
File:
PDF, 1.10 MB
english, 2017
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