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Subvalent Iridium Precursors for Atom-Efficient Chemical Vapor Deposition of Ir and IrO 2 Thin Films
Jürgensen, Lasse, Frank, Michael, Pyeon, Myeongwhun, Czympiel, Lisa, Mathur, SanjayLanguage:
english
Journal:
Organometallics
DOI:
10.1021/acs.organomet.7b00275
Date:
June, 2017
File:
PDF, 6.96 MB
english, 2017