Feature profile simulation of silicon nitride atomic layer...

Feature profile simulation of silicon nitride atomic layer deposition

Moroz, Paul, Moroz, Daniel J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06HE07
Date:
June, 2017
File:
PDF, 2.68 MB
english, 2017
Conversion to is in progress
Conversion to is failed