P-1: Fabrication of a Short-Channel Oxide TFT Utilizing the Resistance-Reduction Phenomenon in In-Ga-Sn-O
Nakata, Mitsuru, Ochi, Mototaka, Tsuji, Hiroshi, Takei, Tatsuya, Miyakawa, Masashi, Fujisaki, Yoshihide, Goto, Hiroshi, Kugimiya, Toshihiro, Yamamoto, ToshihiroVolume:
48
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.11870
Date:
May, 2017
File:
PDF, 197 KB
english, 2017