P-2: Self-Aligned Indium Gallium Zinc Oxide Thin-Film...

SID Symposium Digest of Technical Papers 2017 / 05 Vol. 48; Iss. 1

P-2: Self-Aligned Indium Gallium Zinc Oxide Thin-Film Transistor with Source/Drain Regions Treated by NH3Plasma

Chen, Jiangbo, Gu, Pengfei, Xie, Dini, Liu, Wei, Sun, Hongda, Song, Young Suk, Yan, Liangchen, Wu, Zhongyuan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
48
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.11871
Date:
May, 2017
File:
PDF, 415 KB
english, 2017
Conversion to is in progress
Conversion to is failed