Evaluation of Alternative Atomistic Models for the Incipient Growth of ZnO by Atomic Layer Deposition
Chu, Manh-Hung, Tian, Liang, Chaker, Ahmad, Skopin, Evgenii, Cantelli, Valentina, Ouled, Toufik, Boichot, Raphaël, Crisci, Alexandre, Lay, Sabine, Richard, Marie-Ingrid, Thomas, Olivier, Deschanvres,Volume:
46
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-017-5448-2
Date:
June, 2017
File:
PDF, 1.47 MB
english, 2017