Effects of source gases on the properties of...

Thin Solid Films 2017 / 08 Vol. 636

Effects of source gases on the properties of silicon/nitrogen-incorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

Nakazawa, Hideki, Magara, Kohei, Takami, Takahiro, Ogasawara, Haruka, Enta, Yoshiharu, Suzuki, Yushi
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Volume:
636
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.05.046
Date:
August, 2017
File:
PDF, 1.92 MB
english, 2017
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