[AIP ION IMPLANTATION TECHNOLOGY: 16th International...

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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Investigation of Converted p+ poly-Si Gate Formed by B[sub 18]H[sub X]+] Cluster Ion Implantation

Hwang, Sun-Hwan, Kim, D. S., Joo, Y. H., Oh, J. G., Lee, J. K., Jung, T. W., Cho, H. J., Sohn, Y. S., Sheen, D. S., Pyi, S. H., Kim, Steve, Huh, T. H., Krull, W. A., Cho, H. T.
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Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401485
File:
PDF, 289 KB
english, 2006
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