[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Investigation Of The Impact On Device Parameters of Fluorine Enhanced Oxide In A Power Trench MOSFET
Rice, Jeffrey H., Wu, Chun-TaiVolume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401512
File:
PDF, 186 KB
english, 2006