Theoretical modeling and experimental observations of the atomic layer deposition of SrO using a cyclopentadienyl Sr precursor
Fredrickson, Kurt D., McDaniel, Martin D., Slepko, Alex, Ekerdt, John G., Demkov, Alexander A.Volume:
145
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.4960509
Date:
August, 2016
File:
PDF, 8.04 MB
english, 2016