Effect of thermoelastic damping on silicon, GaAs, diamond and SiC micromechanical resonators
Denu, Garuma Abdisa, Fu, Jiao, Liu, Zongchen, Mirani, Jibran Hussain, Wang, HongxingVolume:
7
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4984288
Date:
May, 2017
File:
PDF, 552 KB
english, 2017