Steady-state analytical model of suspended p-type 3C–SiC bridges under consideration of Joule heating
Balakrishnan, Vivekananthan, Dinh, Toan, Phan, Hoang-Phuong, Kozeki, Takahiro, Namazu, Takahiro, Dao, Dzung Viet, Nguyen, Nam-TrungVolume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa7180
Date:
July, 2017
File:
PDF, 1.05 MB
english, 2017