[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Micro shell resonator with T-shape masses fabricated by improved process using whirling platform and femtosecond laser ablation

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