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[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Micro shell resonator with T-shape masses fabricated by improved process using whirling platform and femtosecond laser ablation
Kun Lu,, Wei Li,, Dingbang Xiao,, Zhanqiang Hou,, Yan Shi,, Xuezhong Wu,, Yulie Wu,Year:
2017
Language:
english
DOI:
10.1109/ISISS.2017.7935654
File:
PDF, 555 KB
english, 2017