Development of Highly Efficient Combined Polishing Method...

Journal of Micro and Nano-Manufacturing 2017 / 06 Vol. 5; Iss. 3

Development of Highly Efficient Combined Polishing Method for Single-Crystal Silicon Carbide

Kurita, Tsuneo, Miyake, Koji, Kawata, Kenji, Ashida, Kiwamu, Kato, Tomohisa
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Volume:
5
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4036828
Date:
June, 2017
File:
PDF, 2.50 MB
english, 2017
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