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[ASME ASME 7th Biennial Conference on Engineering Systems Design and Analysis - Manchester, England (July 19–22, 2004)] Volume 3 - Capacitively and Inductively Coupled Plasma for MEMS Applications

Lozano-Parada, Jaime H., Zimmerman, William B. J.
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Year:
2004
Language:
english
DOI:
10.1115/esda2004-58437
File:
PDF, 746 KB
english, 2004
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