![](/img/cover-not-exists.png)
[ASME ASME 7th Biennial Conference on Engineering Systems Design and Analysis - Manchester, England (July 19–22, 2004)] Volume 3 - Capacitively and Inductively Coupled Plasma for MEMS Applications
Lozano-Parada, Jaime H., Zimmerman, William B. J.Year:
2004
Language:
english
DOI:
10.1115/esda2004-58437
File:
PDF, 746 KB
english, 2004