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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - Novel combined low-coherence interferometry spectrally resolved reflectometry compatible with high-resolution Raman spectroscopy for nondestructive characterization of MEMS structures
Walecki, Wojciech J., Tanner, Danelle M., Ramesham, Rajeshuni, Azfar, Talal, Pravdivstev, Alexander, SantosII, Manuel, Wong, Tim, Feng, Aiguo, Koo, AnnVolume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.645560
File:
PDF, 135 KB
english, 2006