Effective Dielectric Thickness Scaling for High-K Gate...

MRS Proceedings 2002 Vol. 716

Effective Dielectric Thickness Scaling for High-K Gate Dielectric Mosfets

Bhuwalka, Krishna Kumar, Mohapatra, Nihar R., Narendra, Siva G., Rao, V Ramgopal
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Volume:
716
Year:
2002
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-716-B4.19
File:
PDF, 115 KB
english, 2002
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