SiC Solution Growth on Si Face with Extremely Low Density...

Materials Science Forum 2017 / 5 Vol. 897

SiC Solution Growth on Si Face with Extremely Low Density of Threading Screw Dislocations for Suppression of Polytype Transformation

Murayama, Kenta, Hori, Tsukasa, Harada, S., Xiao, S., Tagawa, M., Ujihara, Toru
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.897.24
Date:
May, 2017
File:
PDF, 693 KB
english, 2017
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