The NanoTuFe — Fabrication of large area periodic nanopatterns with tunable feature sizes at low cost
Si, Shuhao, Dittrich, Lars, Hoffmann, MartinLanguage:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.06.002
Date:
June, 2017
File:
PDF, 2.18 MB
english, 2017