A wall shear stress sensor using a pair of sidewall doped...

Journal of Micromechanics and Microengineering 2017 / 07 Vol. 27; Iss. 7

A wall shear stress sensor using a pair of sidewall doped cantilevers

Nguyen, Thanh-Vinh, Kazama, Ryohei, Takahashi, Hidetoshi, Takahata, Tomoyuki, Matsumoto, Kiyoshi, Shimoyama, Isao
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Volume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa736e
Date:
July, 2017
File:
PDF, 3.14 MB
english, 2017
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