[IEEE 2017 IEEE International Memory Workshop (IMW) - Monterey, CA, USA (2017.5.14-2017.5.17)] 2017 IEEE International Memory Workshop (IMW) - First Demonstration of SiGe Channel in Macaroni Geometry for Future 3D NAND
Arreghini, Antonio, Delhougne, Romain, Subirats, Alexandre, Hikavyy, Andriy, Vecchio, Emma, Sebaai, Farid, Breuil, Laurent, Van den bosch, Geert, Furnemont, ArnaudYear:
2017
Language:
english
DOI:
10.1109/IMW.2017.7939083
File:
PDF, 1.26 MB
english, 2017