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Comparative Study of Two Types of Parallel Kinematic Flexure Scanners for Atomic Force Microscopy
Alunda, Bernard Ouma, Lee, Yong Joong, Park, SoyeunLanguage:
english
Journal:
Instrumentation Science & Technology
DOI:
10.1080/10739149.2017.1337640
Date:
June, 2017
File:
PDF, 1.52 MB
english, 2017