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[ASME ASME 2005 International Mechanical Engineering Congress and Exposition - Orlando, Florida, USA (November 5 – 11, 2005)] Microelectromechanical Systems - Parylene Micro-Membrane Capacitive Bio/Chemical Sensor
Satyanarayana, Srinath, McCormick, Daniel T., Majumdar, ArunavaVolume:
2005
Year:
2005
Language:
english
DOI:
10.1115/imece2005-82017
File:
PDF, 367 KB
english, 2005