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SPIE Proceedings [SPIE Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) - Suzhou, China (Tuesday 26 April 2016)] 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - Investigation of the atomic emission spectroscopy of F atoms and CF2 molecules in CF4 plasma processing
Jiang, Wenhan, Yang, Li, Riemer, Oltmann, Li, Shengyi, Wan, Yongjian, Jin, Huiliang, Li, Jie, Tang, Caixue, Deng, Wenhui, Chen, XianhuaVolume:
9683
Year:
2016
Language:
english
DOI:
10.1117/12.2243979
File:
PDF, 260 KB
english, 2016